Structural devices
Structural devices

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Structural devices

Acknowledgements

The content acknowledged below is Proprietary (see terms and conditions [Tip: hold Ctrl and click a link to open it in a new tab. (Hide tip)] ) and is used under a Creative Commons Attribution-NonCommercial-ShareAlike 4.0 Licence.

Grateful acknowledgement is made to the following sources:

Course image: Matthew Rutledge in Flickr made available under Creative Commons Attribution 2.0 Licence.

Figures 33, 37, 38, 40: Courtesy of Trikon Technologies Limited.

Figure 2 Van Baar J. J., et al. (2001) ‘Pirani Pressure Sensor with Distributed Temperature Sensing’, Proceedings of IMECE ‘01, 2001 ASME International Mechanical Engineering Congress and Exposition, November 11–16, 2001, New York, NY, USA.

Figure 4 From Sakimoto M., et al., (1982) Journal of Vacuum Science Technology, Vol. 21, pp. 1017–1021.

Figure 5 Paredes J.I., ‘STM Atomic resolution images of the surface of highly oriented pyrolytic graphite, triangular versus honeycomb structure in atomic-resolution STM images of graphite’, Institute Nacional del Carb.

Figure 14Folch A., et al (1997), Journal of Microelectromechanical Systems, IEEE.

Figure 16 Folch A., et al (1997), Journal of Microelectromechanical Systems, IEEE.

Figure 17 Nagy E., et al, (1998) ‘Carob Nanotube Tipped Atomic Force Microscopy for Measurement of 100 nm etch Morphology on Semiconductors’, American Institute of Physics.

Block 1, Structural and inertial devices, was prepared for the course team by Jan Kowal.

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