The content acknowledged below is Proprietary (see Creative Commons Attribution-NonCommercial-ShareAlike 4.0 Licence.) and is used under a
Grateful acknowledgement is made to the following sources:
Figures 33, 37, 38, 40: Courtesy of Trikon Technologies Limited.
Figure 2 Van Baar J. J., et al. (2001) ‘Pirani Pressure Sensor with Distributed Temperature Sensing’, Proceedings of IMECE ‘01, 2001 ASME International Mechanical Engineering Congress and Exposition, November 11–16, 2001, New York, NY, USA.
Figure 4 From Sakimoto M., et al., (1982) Journal of Vacuum Science Technology, Vol. 21, pp. 1017–1021.
Figure 5 Paredes J.I., ‘STM Atomic resolution images of the surface of highly oriented pyrolytic graphite, triangular versus honeycomb structure in atomic-resolution STM images of graphite’, Institute Nacional del Carb.
Figure 14Folch A., et al (1997), Journal of Microelectromechanical Systems, IEEE.
Figure 16 Folch A., et al (1997), Journal of Microelectromechanical Systems, IEEE.
Figure 17 Nagy E., et al, (1998) ‘Carob Nanotube Tipped Atomic Force Microscopy for Measurement of 100 nm etch Morphology on Semiconductors’, American Institute of Physics.
Block 1, Structural and inertial devices, was prepared for the course team by Jan Kowal.
Don't miss out:
If reading this text has inspired you to learn more, you may be interested in joining the millions of people who discover our free learning resources and qualifications by visiting The Open University - www.open.edu/ openlearn/ free-courses