Structural devices
Structural devices

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Structural devices

3.7.2 The hybrid probe

Where the benefit to be gained from combining the narrow-angled silicon tip with the super-light, any-shape silicon nitride cantilever outweighs the expense and difficulty of the more complex process sequence, AFM probes can be made with silicon tips on silicon nitride cantilevers. Figure 14 shows one such process sequence.

Figure 14
Figure 14 Process sequence for the manufacture of a silicon/silicon nitride combination AFM probe
T356_1

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