My OpenLearn Profile
- Personalise your OpenLearn profile
- Save your favourite content
- Get recognition for your learning
- Subjects
- Science, Maths & Technology
- Free courses
- Structural devices
Structural devices

Microelectronics has enabled designers of integrated circuits to exercise complete control over the electrical characteristics of each component they create. This free course, Structural devices, will illustrate how such control is achieved and the various methods that can be applied in differing circumstances.
Course learning outcomes
After studying this course, you should be able to:
After studying this course, you should be able to:
- understand how to relate physical dimensions and materials properties to static and dynamic behaviour
- demonstrate an awareness of how small features are cut out in solid materials, and how small features are built up in solid materials
- describe the piezoelectric effect and its use for producing small-scale movement in mechanical devices
- state the relative significance of different forces at very small scales
- identify key factors that influence the behaviour of mechanical vibrating and resonant systems.
First Published: 10/08/2012
Updated: 07/05/2019
You can start this course right now without signing-up. Click on any of the course content sections below to start at any point in this course.
If you want to be able to track your progress, earn a free Statement of Participation, and access all course quizzes and activities, sign-up.
Course content
- Introduction
- Learning outcomes
- 1 Structural devices: a static role
- 2 Form and function, method and material
- 3 Building atomic force microscope probes
- 4 Piezoelectricity: motion from crystals
- 5 Short range forces
- 6 Vibrations and resonance
- 7 Deposition
- 8 Etching
- 8 Etching
- 8.1 Introduction
- 8.2 Wet etches: acids and bases
- 8.3 Gas-phase etching
- 8.3.1 Fluorine-based etching of silicon
- 8.3.2 Sputter etching: argon ion etching of gold
- 8.3.3 Reactive ion etching: chlorine/argon plasma etching of aluminium
- 8.3.4 Etchants and protectants: sulphur hexafluoride/oxygen plasma etching of siliconL
- 8.3.5 Alternative plasma chamber designs: MERIE and ICP
- 8.3.6 Deep silicon etching
- 8.4 Stopping the etch
- 8.5 Review
- Conclusion
- Keep on learning
- Acknowledgements
- This site has Copy Reuse Tracking enabled - see our FAQs for more information.
Tags, Ratings and Social Bookmarking
Create an account to get more
Track your progress
Review and track your learning through your OpenLearn Profile.
Statement of Participation
On completion of a course you will earn a Statement of Participation.
Access all course activities
Take course quizzes and access all learning.
Review the course
When you have finished a course leave a review and tell others what you think.
Creative commons: The Open University is proud to release this free course under a Creative Commons licence.
However, any third-party materials featured within it are used with permission and are not ours to give away. These materials are not subject to the Creative Commons licence. See terms and conditions and our FAQs.
Full copyright details can be found in the Acknowledgements section of each week.
For further information, take a look at our frequently asked questions which may give you the support you need.
Have a question?Take your learning further
Making the decision to study can be a big step, which is why you'll want a trusted University. The Open University has 50 years’ experience delivering flexible learning and 170,000 students are studying with us right now. Take a look at all Open University courses.
If you are new to university level study, find out more about the types of qualifications we offer, including our entry level Access courses and Certificates.
Not ready for University study then browse over 900 free courses on OpenLearn and sign up to our newsletter to hear about new free courses as they are released.
Every year, thousands of students decide to study with The Open University. With over 120 qualifications, we’ve got the right course for you.
About this free course
20 hours study
Level 3: Advanced
Create an account to
get more
Create an account and sign in. Enrol and complete the course for a free statement of participation or digital badge if available.
Create account / Sign inDownload this course
Share this free course
Course rewards
Free statement of participation on completion of these courses.
OpenLearn Search website
OpenLearn Links
Footer Menu
Our partners
OpenLearn works with other organisations by providing free courses and resources that support our mission of opening up educational opportunities to more people in more places.


©1999-2020. All rights reserved. The Open University is incorporated by Royal Charter (RC 000391), an exempt charity in England & Wales and a charity registered in Scotland (SC 038302). The Open University is authorised and regulated by the Financial Conduct Authority in relation to its secondary activity of credit broking.